SMT: Printing really small, really fast … … and what to do when you are at the end of your rope (Dr. Andreas Dorsel)
Dr. Andreas Dorsel
Carl Zeiss SMT GMbH, Oberkochen
Max-Planck-Institut für Quantenoptik
Hörsaal, Raum B 0.32 / New lecture hall, Room B 0.32
This talk is intended to provide you with a solid notion of what can be achieved in nano-lithography today, what the present technical limitations are and what we consider at present fundamental boundaries of what may be possible in the future. Carl Zeiss SMT has been active in this field for more than 50 years and its history hence shows some of the technological milestones from the early beginnings of integrated circuits to present-day extreme integration allowing qualitatively new applications of micro- or rather nano-electronics.