Coherent X-ray source for the generation and charakterization of nanostructures

KORONA is a cooperation between the Max Planck Institute of Quantum Optics (MPQ) and the Fraunhofer Institute for Laser Technology (ILT). The motivation behind its establishment in May 2008 was the present urge for the development of new tools for the investigation and generation of nanometer-scale structures. Compact high-power coherent XUV-sources can bring about a revolution to many scientific areas and would open up new markets in medicine, nanotechnology, and analysis. The concentration of the specific expertise of both MPQ and ILT within the KORONA cooperation sets the ground for transferring the technologies of coherent radiation sources in the shortwave spectral range developed at MPQ to applications both in fundamental research as well as in industry.

Semiconductor technology is one of the most important drivers of these developments: chip circuit structures on the 65 nm scale are state-of-the-art by now, and the production of 45 nm-processors has been announced for the beginning of 2009. EUV lithography will soon make it possible to shrink these structures even further down to 32 nm. For this reason it is necessary to not only provide incoherent high power radiation sources in the EUV for lithography but also to develop coherent radiation sources in this wavelength range for metrology, analysis, and generation of optical elements in the nanometer region.

Other scientific applications can be found in the area of high-precision frequency metrology. The increased spacing of the frequency comb allows for the extension of the frequency comb technique to the XUV spectral range, thus providing further verification of quantum electrodynamics by measuring transition frequencies that have not been accessible so far. Of particular interest in this context is the 1S-2S 2-photon transition in helium ions at about 60 nm.

At MPQ, the Laser Spectroscopy Division (Prof. T.W. Hänsch) and the Attosecond and High-Field Physics Division (Prof. F. Krausz) contribute with their deep know-how in femtosecond oscillator technology, the production of coherent X-rays by high harmonic generation in enhancement resonators, pulse compression in the few cycle regime and the use of this radiation for experimental investigations in fundamental research. The crucial contribution of ILT stems from its expertise in high power amplifiers as radiation sources for the enhancement resonators, the development of prototypes, and the use of 2-60 nm XUV/EUV radiation in commercial systems for measurement techniques and for lithography. At ILT, the solid state and diode lasers division (D. Hoffmann) is involved.

Fig.: Schematic overview of the components of the high-power coherent XUV source KORONA.

The project will be sponsored with an amount of 2.1 mio. euro from a fund set up by both scientific organizations (MPG and FhG) in order to foster strategic cooperations between corresponding research institutes.

Information to press release July 2008

Further Information on the department Solid state and diode lasers